Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

نویسندگان

  • Pascual Muñoz
  • Gloria Micó
  • Luis A. Bru
  • Daniel Pastor
  • Daniel Pérez
  • José David Doménech
  • Juan Fernández Peinador
  • Rocío Baños
  • Bernardo Gargallo
  • Rubén Alemany
  • Ana M. Sánchez
  • Josep M. Cirera
  • Roser Mas
  • Carlos Domínguez
چکیده

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

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عنوان ژورنال:

دوره 17  شماره 

صفحات  -

تاریخ انتشار 2017